Journal
TM-TECHNISCHES MESSEN
Volume 78, Issue 11, Pages 484-488Publisher
OLDENBOURG VERLAG
DOI: 10.1524/teme.2011.0201
Keywords
Refractometry; nanopositioning; interferometry; nanometrology
Categories
Funding
- Grant Agency of the Czech Republic [GA102/09/1276, GAP102/11/P820]
- Academy of Sciences of the Czech Republic [KAN311610701]
- Ministry of Education, Youth and Sports of the Czech Republic [LC06007]
- [AV0 Z20650511]
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We present an experimental arrangement of an interferometric system designed to operate with full compensation for varying refractive index of air in the measuring axis. The concept is based on a principle where the wavelength of the laser source is derived not from an optical frequency of the stabilized laser but from a fixed length being a baseplate or a frame of the whole measuring setup. This results into stabilization of the wavelength of the laser source in atmospheric conditions to mechanical length of suitable etalon made of a material with very low thermal expansion. The ultra-low thermal expanding glass ceramic materials available on the market perform thermal expansion coefficients on the level 10(-8) which significantly exceeds the limits of uncertainty posed by indirect evaluation of refractive index of air through Edlen formula. This approach represents a contribution primarily to high-resolution and high-precision dimensional metrology in the nanoscale.
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