Journal
THIN SOLID FILMS
Volume 562, Issue -, Pages 331-337Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2014.03.068
Keywords
Aluminum oxide; Antibacterial; Atomic layer deposition; Barrier; Growth; Zinc oxide
Categories
Funding
- Finnish Funding Agency for Technology and Innovation (TEKES) [40284/10]
Ask authors/readers for more resources
Concerns on food safety, and need for high quality and extended shelf-life of packaged foods have promoted the development of antibacterial barrier packaging materials. Few articles have been available dealing with the barrier or antimicrobial properties of zinc oxide thin films deposited at low temperature with atomic layer deposition (ALD) onto commercial polymer films typically used for packaging purposes. The purpose of this paper was to study the properties of ZnO thin films compared to those of aluminum oxide. It was also possible to deposit ZnO thin films onto oriented polylactic acid and polypropylene films at relatively low temperatures using ozone instead of water as an oxidizing precursor for diethylzinc. Replacing water with ozone changed both the structure and the chemical composition of films deposited on silicon wafers. ZnO films deposited with ozone contained large grains covered and separated probably by a more amorphous and uniform layer. These thin films were also assumed to contain zinc salts of carboxylic acids. The barrier properties of a 25 nm ZnO thin film deposited with ozone at 100 degrees C were quite close to those obtained earlier with ALD Al2O3 of similar apparent thickness on similar polymer films. ZnO thin films deposited at low temperature indicated migration of antibacterial agent, while direct contact between ZnO and Al2O3 thin films and bacteria promoted antibacterial activity. (C) 2014 Elsevier B.V. All rights reserved.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available