Journal
THIN SOLID FILMS
Volume 571, Issue -, Pages 648-652Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2014.02.006
Keywords
FTIR-microscopy; Infrared spectroscopic ellipsometry; Molecular orientation; Thickness; Polymer film; Silicon oxide; Homogeneity
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In the present article we discuss developments towards increasing the spatial resolution of infrared ellipsometry and ellipsometric microscopy for the study of thin films. Relevant aspects in the interpretation of observed peaks in the infrared (ellipsometric) spectra are discussed. In particular anisotropic effects in dependence of molecular orientations in organic films and the excitation of a macroscopic wave, the Berreman mode, in thin silicon oxide films are addressed. For correct interpretation of measured data optical simulations are essential to avoid incorrect conclusions on band frequency and assignments. (C) 2014 Elsevier B.V. All rights reserved.
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