Journal
THIN SOLID FILMS
Volume 548, Issue -, Pages 460-464Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2013.09.082
Keywords
Transparent conductive oxide; Light-trapping effect; Atmospheric pressure plasma
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Funding
- Mechanical and Systems Research Laboratories, Industrial Technology Research Institute (ITRI)
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To enhance the light-trapping qualities of silicon thin-film solar cells, the use of transparent conductive oxide with high haze and high conductivity is essential. This study investigated an eco-friendly technique that used bilayer Ga-doped zinc oxide/SiOx films prepared with an atmospheric pressure plasma jet to achieve high haze and low resistivity. A minimum resistivity of 6.00 x 10(-4) Omega.cm was achieved at 8 at.% gallium doping. Examination of X-ray diffraction spectra showed that increased film thickness led to increased carrier concentration in GZO bilayers. The optimal bilayer GZO film achieved considerably higher haze values in the visible and NIR regions, compared with Asahi U-type fluorine doped tin oxide. (C) 2013 Elsevier B. V. All rights reserved.
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