Journal
THIN SOLID FILMS
Volume 520, Issue 12, Pages 4131-4138Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2011.04.067
Keywords
Ga-doped ZnO transparent electrode; Liquid crystal display; LCD-display TV set; Wet chemical etching; Fine pattern; Alkaline TMAH developer; Etchant; Photoresist stripper
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Liquid crystal displays (LCDs) with Ga-doped ZnO (GZO) transparent electrodes on RGB color filters were fabricated to demonstrate the feasibility of using this new material as an alternative to indium tin oxide (ITO) electrodes. The process flow for fabricating LCDs with GZO electrodes was entirely compatible with that for commercially available LCDs using ITO electrodes. Concurrently, photolithography processing and wet-chemical etching techniques for the formation of GZO transparent electrodes on thin film transistor (TFT) arrays in LCD panels was developed. Fine-patterns of GZO with 2-mu m line widths were successfully formed using lithography and wet -etching technology with a weakly acidic etchant of pH 5.5-6.8. (C) 2011 Elsevier B.V. All rights reserved.
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