Journal
THIN SOLID FILMS
Volume 520, Issue 6, Pages 1821-1825Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2011.08.107
Keywords
Lithium phosphorus oxynitride; Radio-frequency sputtering; Ionic conductivity; X-ray diffraction; Scanning electron microscopy; Durability
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Lithium phosphorus oxynitride (LiPON) films were prepared by radio frequency magnetron sputtering. In order to control the atomic composition of the films, a mixture of Li3PO4 and Li2O powders was used as the sputtering target. The ionic conductivity of the films showed a maximum (6.4 x 10(-6) S/cm) when the molar ratio of Li3PO4 to Li2O in the target was 1:2. The films formed from a target not containing Li2O showed good durability in air at the expense of slightly poorer ionic conductivity. This is probably due to the amount of Li in the film being significantly less which effectively suppressed absorption of CO2 in air. (C) 2011 Elsevier B.V. All rights reserved.
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