Journal
THIN SOLID FILMS
Volume 521, Issue -, Pages 60-64Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2012.03.071
Keywords
TCO; ITO; IZTO; RF thermal plasma; Indium; Nano powder
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A route to obtain nano-sized IZTO (Indium Zinc Tin Oxide) materials with relatively low indium content is investigated using an RF (Radio-Frequency) thermal plasma system. For this purpose, In2O3, SnO2 and ZnO with the sizes of 0.1-1 mu m were mixed at the cation ratios of 6:2:2 and 2:1:1, and then, injected into RF thermal plasma with a plate power level of similar to 26.6 kVA. From the field emission scanning electron microscopy images and the transmission electron microscopy-electron energy loss spectroscopy mapping images of the as-synthesized powders, it was found that the three oxides were unified into nano-sized IZTO particles (<50 nm), with each element of In, Zn and Sn uniformly distributed. In addition, X-ray diffraction data and inductively coupled plasma-optical emission spectrometry analysis results showed that the IZTO powders with a single phase of bixbyite In2O3 structure can be achieved even with an indium content of 60 at.%. (C) 2012 Elsevier B.V. All rights reserved.
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