Journal
THIN SOLID FILMS
Volume 520, Issue 3, Pages 986-993Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2011.04.174
Keywords
Surface acoustic wave; Rayleigh wave; Gas sensor; Layered films
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A brief review of the Surface Acoustic Wave (SAW)-based gas sensors and their physical operation background in a dual-delay line oscillator system is presented together with some own achievements dealing with SAW layered sensor structures. (C) 2011 Elsevier B.V. All rights reserved.
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