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Endotaxial silicide nanowires: A review

Journal

THIN SOLID FILMS
Volume 519, Issue 24, Pages 8434-8440

Publisher

ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2011.05.034

Keywords

Silicide; Nanowire; Epitaxy; Endotaxy

Funding

  1. NSF [ECS0304682, DMR0503705]

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We review the topic of self-assembled endotaxial silicide nanowires on silicon. Crystallographic orientation, lattice mismatch and average dimensions are discussed for a variety of systems including Ti, Mn, Fe, Co, Ni, Pt and several rare earths on Si(100), Si(111) and Si(110) surfaces. In situ observations of growth dynamics support a constant-shape growth model, in which length, width and thickness all change in proportion as the nanowire grows, with thermally activated, facet-dependent rates. (C) 2011 Elsevier B. V. All rights reserved.

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