Journal
THIN SOLID FILMS
Volume 520, Issue 3, Pages 1041-1047Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2011.07.055
Keywords
Carbon nanotubes; Microelectrode array; Lithography; Su-8 Resin; Pyrolysis; Current-voltage measurements; Scanning electron microscopy
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An integration strategy is devised for a reliable and scalable assembly of carbon nanotubes in photoresist-derived glassy-like carbon microelectrodes. The approach involves UV photolithography process with carbon nanotube monodispersed photoresist followed by high temperature pyrolysis process, and is versatile in yielding various 3-dimensional micro-nano integrated carbon microelectrode arrays. The morphology of the micro-nano integrated structures is characterized. The integrated microelectrodes demonstrate better electrical performance than the blank microelectrodes, showing potential applications in high-sensitive chemical and biological detection systems. The developed method represents a low-cost and facile way to mass production of carbon nanotube-integrated carbon microelectrode array. (C) 2011 Elsevier B.V. All rights reserved.
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