Journal
THIN SOLID FILMS
Volume 520, Issue 4, Pages 1334-1340Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2011.04.149
Keywords
Inkjet printing; Multicomponent metal oxides; Thin-film transistors
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In this work we report on the fabrication and characterization of multicomponent metal oxide thin-film transistors with a double-layer inkjet printing process. Both the active area and source-drain electrodes of the devices are printed with inks based on metal salt precursors to form Ga2O3-In2O3-ZnO and In2O3-SnO respectively. Electrical characterization has shown that the devices' performance, apart from the active area composition, can also be affected by the printing drop spacing. In general, devices printed with Ga:In:Zn 2:4:1 composition present the highest field effect mobility (similar to 1.75-3 cm(2) V (1) s (1)). More stable devices with improved switching, but with a compromise over field effect mobility (similar to 0.5-0.9 cm(2) V-1 s(-1)) were obtained for the 2: 4: 2 composition. (C) 2011 Elsevier B. V. All rights reserved.
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