Journal
THIN SOLID FILMS
Volume 519, Issue 16, Pages 5433-5436Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2011.02.069
Keywords
Lead magnesium niobate-lead titanate; Thin films; Buffer layer; Lead zirconate titanate; Electrocaloric effect; Sputtering
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Funding
- Australian Research Council [Australian Research Council Discovery Program (DP08709070]
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0.68PbMg(1/3)Nb(2/3)O(3)-0.32PbTiO(3) (PMN-PT) thin films with a lead zirconate titanate Pb(Zr0.3Ti0.7)O-3 (PZT)/PbOx buffer layer were deposited on Pt/TiO2/SiO2/Si substrates by radio frequency magnetron sputtering technique, and pure perovskite crystalline phase with highly (100)-preferred orientation was formed in the ferroelectric films. We found that the highly (100)-oriented thin films possess not only excellent dielectric and ferroelectric properties but also a large electrocaloric effect (13.4 K at 15 V. i.e., 0.89 K/V) which is attributed to the large electric field-induced polarization and entropy change during the ferroelectric-paraelectric phase transition. The experimental results indicate that the use of PZT/PbOx buffer layer can induce the crystal orientation and phase purity of the PMN-PT thin films, and consequently enhance their electrical properties. (C) 2011 Elsevier B.V. All rights reserved.
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