Journal
THIN SOLID FILMS
Volume 519, Issue 18, Pages 5962-5965Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2011.03.040
Keywords
Germanium; Annealing; Voids; Ion implantation; Transmission electron microscopy
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Funding
- Intel Corporation
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The formation of voids in ion-implanted Ge was studied as a function of ion implantation energy and dose. (001) Ge substrates were self-implanted at energies of 20-300 kev to doses of 1.0 x 10(13)-1.0 x 10(17) cm(-2), Transmission electron microscopy revealed clusters of voids just below the surface for implant energies <= 120 kev at a dose of 2.0 x 10(15) cm(-2) and complete surface coverage for an implant energy of 130 kev and doses >= 1.0x10(16) cm(-2). Void clusters did not change in size or density after isothermal annealing at 330 degrees C for 176 min. The initial void formation is discussed in terms of the vacancy clustering and microexplosion theories with a damage map detailing the implant conditions necessary to produce voids. (C) 2011 Elsevier B.V. All rights reserved.
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