Journal
THIN SOLID FILMS
Volume 519, Issue 1, Pages 96-100Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2010.07.062
Keywords
Thin films; TiO2-ZrO2; Sol-gel; Anatase; Brookite; Optical properties; Structural properties; Thermal properties
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We have studied the structural and optical properties of thin films of TiO2, doped with 5% ZrO2 and deposited on glass substrate (by the sol-gel method). The dip-coated thin films have been examined at different annealing temperatures (350 to 450 degrees C) and for various layer thicknesses (63-286 nm). Refractive index and porosity were calculated from the measured transmittance spectrum. The values of the index of refraction are in the range of 1.62-2.29 and the porosity is in the range of 0.21-0.70. The coefficient of transmission varies from 50 to 90%. In the case of the powder of TiO2, doped with 5% ZrO2, and aged for 3 months in ambient temperature, we have noticed the formation of the anatase phase (tetragonal structure with 14.8 nm grains). However, the undoped TiO2 exhibits an amorphous phase. After heat treatments of thin films, titanium oxide starts to crystallize at the annealing temperature 350 degrees C. The obtained structures are anatase and brookite. The calculated grain size, depending on the annealing temperature and the layer thickness, is in the range (8.58-20.56 nm). (C) 2010 Elsevier B.V. All rights reserved.
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