☆ 4.4 Letter

Fully strained low-temperature epitaxy of TiN/MgO(001) layers using high-flux, low-energy ion irradiation during reactive magnetron sputter deposition

THIN SOLID FILMS (2010)

Get Full Text
Add to Collection

Journal

THIN SOLID FILMS
Volume 518, Issue 18, Pages 5169-5172

Publisher

ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2010.04.028

Keywords

Epitaxy; Sputter deposition; Transition metal nitrides

Categories

Materials Science, Multidisciplinary Materials Science, Coatings & Films Physics, Applied Physics, Condensed Matter

Ask authors/readers for more resources

Protocol

Community support

Reagent

Community support

Authors

I am an author on this paper
Click your name to claim this paper and add it to your profile.

Reviews

Primary Rating

4.4
Not enough ratings

Secondary Ratings

Novelty
-
Significance
-
Scientific rigor
-
Rate this paper

Recommended

No Data Available
No Data Available
Webinars Posters Questions Hubs Funding Journals Papers Connect Collections Reviewers About Us FAQs Mobile App Privacy Policy Terms of Use
© Peeref 2019-2024. All rights reserved.