Journal
THIN SOLID FILMS
Volume 518, Issue 15, Pages 4225-4230Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2009.12.082
Keywords
Magnesium; Carbon; In-situ resistance measurements; X-ray photoelectron spectroscopy; Magnetron sputtering; X-ray diffraction; Elastic recoil detection analysis
Categories
Funding
- Icelandic Research Fund
- University of Iceland
- Steinmaur Foundation
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We investigate the growth and structure properties of Mg:C thin films. The films are prepared using a dc magnetron sputtering discharge where the electrical resistance over the films is monitored during growth in-situ with a four point probe setup. The structural properties of the films are investigated using X-ray diffraction measurements and the elemental composition and binding in the films is determined using elastic recoil detection analysis and X-ray photoelectron spectroscopy. The results show that during co-sputtering the carbon flux influences the initial stages of the film growth. The films are made of polycrystalline magnesium grains embedded in a carbon network, the size of which depends on the carbon content, but amorphous phases cannot be excluded. The XPS measurements show the presence of carbidic carbon whereas X-ray measurements find no Mg:C phases. The overall stability of the films is found to depend on the carbon content, where stable films capped with a 14 nm Pd layer cannot be obtained with carbon content above 18%. (C) 2009 Elsevier B.V. All rights reserved.
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