Journal
THIN SOLID FILMS
Volume 517, Issue 22, Pages 6170-6175Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2009.04.013
Keywords
Mesoporous; In2O3; Gas sensor; Structure replication
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We present the preparation of a semiconductor gas sensor based on ordered mesoporous In2O3. The In2O3 was synthesized by structure replication procedure from cubic KIT-6 silica. A detailed analysis of the morphology of the mesoporous powders as well as of the prepared sensing layer will be shown. Unique properties arise from the synthesis method of structure replication such as well defined porosity in the mesoporous regime and nanocrystallites with high thermal stability up to 450 degrees C. These properties are useful for the application in semiconducting gas sensors. Test measurements show sensitivity to methane gas in concentrations relevant for explosion prevention. (C) 2009 Elsevier B.V. All fights reserved.
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