Journal
THIN SOLID FILMS
Volume 517, Issue 2, Pages 948-951Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2008.07.016
Keywords
Silicon nanoporous pillar array (Si-NPA); Capacitive humidity sensor; Sensitivity; Response/recovery time; Humidity hysteresis
Categories
Funding
- National Natural Science Foundation of China (NSFC) [10574112]
Ask authors/readers for more resources
A capacitive humidity sensor with coplanar interdigital electrodes was fabricated based on silicon nanoporous pillar array (Si-NPA). By applying an electrical signal of 1 kHz frequency, a capacitance increment over 1190% was obtained with the relative humidity changing from 11.3% to 94.6%. The response and recovery times were determined to be similar to 11 s and 2 s, respectively, and the humidity hysteresis observed was small. These performances were attributed to the unique structure and morphology of Si-NPA, i.e., the nanoporous and regularly arrayed silicon pillars not only enlarged the sensing area, but also provided an effective channels for vapor transport. (C) 2008 Published by Elsevier B.V.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available