Journal
THIN SOLID FILMS
Volume 516, Issue 10, Pages 3431-3435Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2007.12.131
Keywords
surface structure; nanostructures; hierarchical structure; polymer replication
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Well-defined hierarchical structures, 3-dimensional upright structures containing aligned nanoernbosses or nanoposts within micron-sized patterned areas, were realized or) a polymer surface by utilizing patterned anodized aluminum oxide (AAO) and electrochemical reactions followed by a heat- and pressure-driven polymer imprinting technique. Sputtered Al on AAO could work excellently as a mask for the selective etching of AAO and successive anodization processes and many interesting hierarchical structures could be generated on an Al surface, from which hierarchical structures could be reproducibly duplicated onto polymer surfaces. (c) 2008 Elsevier B.V. All rights reserved.
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