Journal
JOURNAL OF CENTRAL SOUTH UNIVERSITY
Volume 22, Issue 11, Pages 4097-4104Publisher
JOURNAL OF CENTRAL SOUTH UNIV TECHNOLOGY
DOI: 10.1007/s11771-015-2955-2
Keywords
ultrananocrystalline diamond; hot filament chemical vapor deposition (HFCVD); nano-mechanics properties; bistratal filament structure
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Funding
- National Natural Science Foundation of China [51301211, 21271188]
- Foundation of Laboratory of Ultra Precision Manufacturing Technology of China Academy of Engineering Physics [ZZ13005]
- Research Foundation of China Academy of Engineering Physics [2010A0302013]
- China Postdoctoral Science Foundation [2012M521541]
- State Key Laboratory of Powder Metallurgy (Central South University), China [20110933K]
- Open-End Fund for Valuable and Precision Instruments of Central South University, China [CSU2013016]
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Diamond films were prepared by hot filament chemical vapor deposition (HFCVD) in a gas mixtures system of methane, argon and hydrogen. The composition and morphology in different deposition pressures and filament structures were investigated, as well as the friction and wear-resistant properties. The sp(3)-bonded content was measured and nano-mechanics properties were also tested. Results of atomic force microscopy and X-ray photoelectron spectroscopy show that the diamond films whose surface roughness is less than 10 nm and sp(3)-bonded content is greater than 70% can be prepared by bistratal filament structure with optimized proportion of Ar. It is also shown that the friction coefficient of diamond films is 0.13 and its wear-resistant property is excellent. Nano-mechanics of films shows that its elastic modulus is up to 650 MPa and hardness can reach higher than 60 GPa. The diamond films with excellent performance have a broad application prospect in microelectromechanical systems (MEMS).
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