Journal
TECHNICAL PHYSICS
Volume 53, Issue 8, Pages 1070-1073Publisher
MAIK NAUKA/INTERPERIODICA/SPRINGER
DOI: 10.1134/S106378420808015X
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Funding
- Alexander von Humboldt Foundation (Germany)
- Austrian Scientific Foundation
- Physical Science Department at the Russian Academy of Sciences
- Russian Foundation for Basic Research [04-02-97505, 06-02-08147-ofi]
- Federal Science and Innovation Agency [02.513.11.3150]
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The depth profiles of 40-keV cobalt, chromium, and copper ions implanted into a titanium dioxide matrix at doses of 10(16)-10(17) ions/cm(2) are simulated with the DYNA software package. Its algorithm is based on the effects of pair collisions of introduced ions with substrate atoms, which result in a dynamic change in the elemental composition of the near-surface layer in the irradiated material, and takes into account surface sputtering. The results obtained are compared with the standard statistical distribution calculated by the TRIM algorithm.
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