Journal
SURFACE AND INTERFACE ANALYSIS
Volume 46, Issue -, Pages 368-371Publisher
WILEY
DOI: 10.1002/sia.5671
Keywords
Ar-GCIB; dynamic; IMS-4f
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We have developed Ar-gas cluster ion beam (GCIB) dynamic secondary ion mass spectrometry system by introducing Ar-GCIB column to IMS-4f. Mass spectrums of arginine and polystyrene (PS) are obtained with typical fragment ions. Depth profiles of PS are obtained within 10nm depth resolutions. Secondary ion images of fine-patterned PS are observed within 10 mu m image resolutions. Copyright (c) 2014 John Wiley & Sons, Ltd.
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