Journal
SURFACE AND INTERFACE ANALYSIS
Volume 45, Issue 11-12, Pages 1775-1780Publisher
WILEY
DOI: 10.1002/sia.5321
Keywords
Multifractal Analysis; Surface Morphology; Thin Films; AFM Image; Ion Fluence
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Funding
- UGC-CSIR
- DST
- DST/MoES/ISRO
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The surface morphologies of CaF2 thin films prepared by electron beam evaporation technique were measured by atomic force microscopy. The films were bombarded by energetic ion beams of different fluences, which modified the surface morphology predominantly via the process of erosion. The dependence of the surface morphology on ion fluence was explored using multifractal analysis. It was found that the roughness of the film first decreased with ion fluence but increased at higher fluences. Copyright (c) 2013 John Wiley & Sons, Ltd.
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