Journal
SURFACE AND INTERFACE ANALYSIS
Volume 44, Issue 11-12, Pages 1459-1461Publisher
WILEY-BLACKWELL
DOI: 10.1002/sia.4975
Keywords
thin films; Fe-Ni; energy dispersive electron probe microanalysis (ED-EPMA); STRATAGem; k-values; mass coverage; elemental composition; thickness; CCQM
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The elemental composition of thin Fe-Ni alloy films deposited on silicon substrates were determined by electron probe microanalysis with an energy dispersive spectrometer using the STRATAGem software. The work was part of ample inter-laboratory comparisons organized in the frame of CCQM/SAWG (Consultative Committee for Amount of Substance/Surface Analysis Working Group). Therefore, the evaluation of the measurement uncertainties is treated in detail. By having the mass coverage and estimating a layer density, the layer thickness could be derived. Copyright (C) 2012 John Wiley & Sons, Ltd.
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