Journal
SURFACE AND INTERFACE ANALYSIS
Volume 44, Issue 11-12, Pages 1542-1546Publisher
WILEY
DOI: 10.1002/sia.4996
Keywords
CIGS; FIB; self-assembly; nanostructure; in-situ SEM
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Funding
- Korea Ministry of Knowledge Economy
- KIST
- National Research Foundation of Korea
- Korea government (MEST) [2011-0019984]
- CCRF
- CNNC at Sungkyunkwan University
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We report a phenomenological study of Cu(In,Ga)Se2 (CIGS) dots and their morphological transition into nano-ridge shapes induced by application of a focused ion beam (IB) to CIGS film. Real-time observations of nano-structure evolution during IB irradiation were obtained by recording sequential images at various ion energies of 1 to 30 keV. We observed that as irradiation time increased, the dots became larger and developed elongated ridge structures under continuous sputtering. This transition process was induced by a combination of the Ostwald ripening processes and cluster diffusion. Compositional analysis revealed that the nano-dots changed from pristine CIGS to Cu-rich CIGS. The Ga content of the dots was also found to increase due to sputtered implantation, while levels of In and Se decreased. Copyright (C) 2012 John Wiley & Sons, Ltd.
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