Journal
SURFACE & COATINGS TECHNOLOGY
Volume 352, Issue -, Pages 508-512Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.surfcoat.2018.08.054
Keywords
Co-based multilayer; Interface structure; Annealing; Intermixing; STEM; HAADF
Funding
- international ANR-NSFC COBMUL project (ANR) [10-INTB-902-01]
- NSFC [11061130549, 51702133]
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The evolution upon annealing from room temperature to 600 degrees C of the microstructure of Co/Mo2C/Y and Co/Y/Mo2C multilayer stacks has been studied by transmission electron microscopy combining HAADF-STEM, EDX and HRTEM. Both kinds of samples show significant amount of intermixing even in the as-deposited state. The mixing further increases upon annealing. Most of the mixing occurs between the Co and the Mo elements, the Y layers staying comparatively preserved. After annealing at 600 degrees C a surprising sharpening of the interfaces is observed. It is ascribed to the formation of Co-Mo compounds. Combining these analyses with the results we have already published, we can explain in a consistent way the evolution of the x-ray reflectivity measurements of the samples upon annealing. Understanding the evolution the optical properties of such stacks designed to work in the soft x-ray range is essential for improving the optical performance of multilayer structures.
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