Journal
SURFACE & COATINGS TECHNOLOGY
Volume 206, Issue 16, Pages 3450-3453Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.surfcoat.2012.02.004
Keywords
Amorphous carbon; Sputtering; Structure; Transmission electron microscopy
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Thin carbon films containing about 11 at.% Ag were deposited by dc magnetron sputtering of composite graphite/silver target. The stability of film microstructure upon annealing at 600 degrees C in a vacuum has been studied by transmission electron microscopy and electron diffraction. The as-deposited C/Ag films consisted of silver nanoparticles distributed in an amorphous carbon matrix. Upon annealing, the tendency was revealed towards coalescence within the set of particles, i.e. increase in the particle average diameter and decrease in the density of particles with time. The above changes occurred faster than it is predicted by the theories for three-dimensional and two-dimensional diffusion coalescence. The direct collisions and fusion of particles along with the diffusion transport of Ag atoms is suggested to cause the above effect. (C) 2012 Elsevier B.V. All rights reserved.
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