Gas aggregation nanocluster source - Reactive sputter deposition of copper and titanium nanoclusters

Copper and titanium nanoclusters in Ar and in Ar+O(2) gas mixtures were prepared using a magnetron based gas aggregation cluster source designed for Ultra High Vacuum operation. A considerable influence of oxygen addition on the formation of clusters was observed even at oxygen-to-argon admixture levels of the order of 1:1000. A quadrupole mass filter determined nanocluster size distribution while the total deposition rate was determined by quartz crystal measurements. (C) 2010 Elsevier B.V. All rights reserved.