Journal
SUPERLATTICES AND MICROSTRUCTURES
Volume 47, Issue 6, Pages 772-778Publisher
ACADEMIC PRESS LTD- ELSEVIER SCIENCE LTD
DOI: 10.1016/j.spmi.2010.03.006
Keywords
ZnO nanowire; Moisture sensor; Relative humidity; One-dimensional; Humidity
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Funding
- Center for Frontier Materials and Micro/Nano Science and Technology
- Advanced Optoelectronic Technology Center, National Cheng Kung University (NCKU) under the Ministry of Education [98-D0204-6]
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In this paper, we report the growth of high-density single crystalline ZnO nanowires on patterned ZnO:Ga/SiO2/Si templates. A humidity sensor was then fabricated using the randomly oriented nanowires bridged across two electrodes. By measuring current-voltage characteristics of the fabricated device at 80 degrees C, it was found that measured resistances were 5.9 x 10(5), 4.3 x 10(5), 3.7 x 10(5) and 3.2 x 10(5) Omega when measured with 25%, 50%, 70% and 90% relative humidity, respectively. (C) 2010 Elsevier Ltd. All rights reserved.
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