Superconducting single-photon detector made of MoSi film

We fabricated and characterized nanowire superconducting single-photon detectors made of 4 nm thick amorphous MoxSi1-x films. At 1.7 K the best devices exhibit a detection efficiency (DE) up to 18% at 1.2 mu m wavelength of unpolarized light, a characteristic response time of about 6 ns and timing jitter of 120 ps. The DE was studied in wavelength range from 650 nm to 2500 nm. At wavelengths below 1200 nm these detectors reach their maximum DE limited by photon absorption in the thin MoSi film.