Journal
SOLID-STATE ELECTRONICS
Volume 52, Issue 11, Pages 1755-1765Publisher
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.sse.2008.07.009
Keywords
Tunnelling; Schottky structure; MOS structure
Funding
- Slovak Research and Development Agency [APVV-20-055405, APVV-51-017004]
- Ministry of Education of the Slovak Republic [VEGA 0742/08, 3091/06]
Ask authors/readers for more resources
We derive general formulae for calculating the transport of free charge carriers in a MOS structure with a thin insulating layer. In particular, we obtain relationships for boundary concentrations of free charge carriers on the insulator-semiconductor interface and for the current densities flowing through the MOS structure. Our direct tunnelling-diffusion approach makes the well known thermionic emission-diffusion theory for the Schottky interface applicable also to metal-insulator-semiconductor barriers with a very thin insulator layer. We demonstrate how direct tunnelling through the insulating layer and drift-diffusion of free charge carriers in the semiconductor affect the I-V and C-V curves and the boundary concentrations needed to numerically solve the continuity equations. (C) 2008 Elsevier Ltd. All rights reserved.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available