Journal
SOLAR ENERGY MATERIALS AND SOLAR CELLS
Volume 98, Issue -, Pages 253-259Publisher
ELSEVIER
DOI: 10.1016/j.solmat.2011.11.013
Keywords
Transparent conductive oxides; In situ stress; Electro-optical properties; Strain engineering
Funding
- European and Wallonia Region FEDER [ECP12020011678F]
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Transparent and conductive ZnO:Al films were deposited by RF magnetron sputtering on opaque (Si/SiO2) or transparent (glass) substrates. The internal stress evolution has been measured in situ using a high resolution 2D curvature measurement technique. Internal tensile or compressive stresses were generated, depending on the sputtering pressure, oxygen addition level and substrate temperature. The origin of the observed stress level is correlated with factors affecting the film growth mechanism, and the relation with the electro-optical properties of the resulting transparent and conductive oxide films is highlighted. (C) 2011 Elsevier B.V. All rights reserved.
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