Electromechanical coupling in electrostatic micro-power generators

Electrostatic micro-power generators (MPGs) are modeled and analyzed with particular emphasis on electromechanical coupling and its impact on the system dynamics. We identify two qualitatively different regimes in the MPG response, dubbed slow and fast. A linearized electromechanically coupled model of an electrostatic MPG and two simplified linear models are used to study the response of the MPG. Linear models are found adequate to represent the dynamic response of fast MPGs but inadequate to represent the response of slow and mixed domain MPGs. A nonlinear model is developed and validated to describe the response of those MPGs under moderately large excitations. On the basis of this analysis, we describe a method and provide design rules for realizing wideband electrostatic MPGs, and develop closed-form formulae for the extracted power for MPGs under moderately large excitations.