4.8 Article

Toughening Thin-Film Structures with Ceramic-Like Amorphous Silicon Carbide Films

Journal

SMALL
Volume 10, Issue 2, Pages 253-257

Publisher

WILEY-V C H VERLAG GMBH
DOI: 10.1002/smll.201300130

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Funding

  1. US Department of Energy [DE-FG02-07ER46391]
  2. Stanford Graduate Fellowship

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