Pitch-Tunable Size Reduction Patterning with a Temperature-Memory Polymer

SMALL

Volume 9, Issue 2, Pages 193-198

WILEY-V C H VERLAG GMBH

temperature memory effects; shape memory polymers; nanoimprint lithography; pitch reduction; patterning

Chemistry, Multidisciplinary Chemistry, Physical Nanoscience & Nanotechnology Materials Science, Multidisciplinary Physics, Applied Physics, Condensed Matter

1. National Research Foundation of Korea (NRF) [20110017530]
2. WCU (World Class University) program [R31-2008-000-10083-0]
3. Basic Science Research Program [2010-0027955]
4. Korea Research Foundation Grant [KRF-J03003]
5. Global Frontier R&D Program on Center for Multiscale Energy System
6. Institute of Biological Engineering of Seoul National University
7. National Research Foundation of Korea [2009-0094042, 2011-0031561, 2011-0017530, R31-2012-000-10083-0] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)