Journal
SMALL
Volume 6, Issue 11, Pages 1248-1254Publisher
WILEY-V C H VERLAG GMBH
DOI: 10.1002/smll.201000060
Keywords
capacitors; electrohydrodynamic lithography; pattern formation; polymers; viscosity
Categories
Funding
- Kodak European Research, Cambridge
Ask authors/readers for more resources
This study explores a number of low-viscosity glass-forming polymers for their suitability as high-speed materials in electrohydrodynamic (END) lithography. The use of low-viscosity polymer films significantly reduces the pattering time (to below 10 s) compared to earlier approaches, without compromising the high fidelity of the replicated structures. The rapid pace of this process requires a method to monitor the completion of END pattern formation. To this end, the leakage current across the device is monitored and the sigmoidal shape of the current curve is correlated with the various stages of EHD pattern formation.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available