Fabrication of Monolithic Bridge Structures by Vacuum-Assisted Capillary-Force Lithography

SMALL

Volume 5, Issue 7, Pages 790-794

WILEY-V C H VERLAG GMBH

bridge structures; capillarity; curing; lithography

Chemistry, Multidisciplinary Chemistry, Physical Nanoscience & Nanotechnology Materials Science, Multidisciplinary Physics, Applied Physics, Condensed Matter

1. Korean government (MOST) [R01-2007-000-20675-0]
2. King Abdullah University of Science and Technology (KAUST) [KUK-F1-037-02]
3. Korean Government (MOEHRD) [KRF-J03000]
4. Center for Nanoscale Mechatronics Manufacturing [08K1401-00210]
5. Korean Ministry of Knowledge Economy [10030046]
6. Korea Institute of Industrial Technology(KITECH) [10030046] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
7. National Research Foundation of Korea [14-2008-01-001-00, R01-2007-000-20675-0, 2007-0055586] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)