Journal
SMALL
Volume 5, Issue 5, Pages 583-586Publisher
WILEY-V C H VERLAG GMBH
DOI: 10.1002/smll.200801197
Keywords
conducting polymers; isotropic plasma etching; nanoimprint lithography; patterning
Categories
Funding
- National Natural Science Foundation of China [20773052, 20373019]
- Program for New Century Excellent Talents in University [2007CB808003, 2009CB939701]
- Program for Changjiang Scholars and Innovative Research Teams in University [IRT0422]