4.8 Article

A Strategy for Patterning Conducting Polymers Using Nanoimprint Lithography and Isotropic Plasma Etching

Journal

SMALL
Volume 5, Issue 5, Pages 583-586

Publisher

WILEY-V C H VERLAG GMBH
DOI: 10.1002/smll.200801197

Keywords

conducting polymers; isotropic plasma etching; nanoimprint lithography; patterning

Funding

  1. National Natural Science Foundation of China [20773052, 20373019]
  2. Program for New Century Excellent Talents in University [2007CB808003, 2009CB939701]
  3. Program for Changjiang Scholars and Innovative Research Teams in University [IRT0422]

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