Journal
SMALL
Volume 4, Issue 10, Pages 1605-1609Publisher
WILEY-V C H VERLAG GMBH
DOI: 10.1002/smll.200800280
Keywords
lithography; microcontainers; self-assembly; thin-film stress
Categories
Funding
- Arnold and Mabel Beckman Foundation
- Camille-Dreyfus Foundation
- National Science Foundation [Career-DMMI 044816]