Journal
SENSORS AND ACTUATORS B-CHEMICAL
Volume 274, Issue -, Pages 60-65Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2018.07.096
Keywords
Optical gas sensing; Evanescent-field absorption; Silicon photonics; Beer-Lambert law
Funding
- Federal Ministry of Transport, Innovation and Technology (BMVIT)
- Federal Ministry of Digital and Economic Affairs (BMDW)
- Federal Province of Carinthia
- Federal Province of Styria within the COMET - Competence Centers for Excellent Technologies Programme
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The miniaturization of optical gas sensors is of interest for automotive and consumer electronics. We recently presented the use of silicon waveguides for evanescent-field gas detection in the mid-infrared by using an external laser source. However, the feasibility of the method is not guaranteed when the laser source is replaced by an integrated light source, typically a thermal emitter, due to the lower emitted power of the latter. Here, after experimentally characterizing the evanescent-field ratio of the fabricated structures, we demonstrate the feasibility of gas detection using a silicon waveguide and a low-cost integrated thermal emitter. Specifically, using the first demonstrators we achieve CO2 detection down to a concentration of 10% with a confidence level of three standard deviations. The current detection limit is close to that previously measured with an external laser source and it is mainly limited by the yet not-optimized waveguide structure. This research represents a promising advancement for the development of fully-integrated photonic gas sensors in the mid-infrared.
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