Journal
SENSORS AND ACTUATORS B-CHEMICAL
Volume 202, Issue -, Pages 330-338Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2014.05.070
Keywords
Morphology; Microstructure; Oxide-film constitution; Sputtering; Gas sensor
Funding
- Priority Research Centers Program
- Mid-career Researcher Program
- Basic Science Research Program through the National Research Foundation of Korea (NRF) - Korean government (MSIP) [2009-0093819, 2011-0017245, 2008-0062617]
- National Research Foundation of Korea [2011-0017245] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
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Cuprous oxide is a famous p-type material which possesses a great potential in the gas sensing applications. In this paper, thin films and submicron-sized rods and trees of Cu2O were deposited on glass substrates from metallic Cu targets by tailoring the Ar/O-2 ratio during the sputtering process. The obtained samples are used to fabricate gas sensors. The H2S-sensing properties of the sensors at working temperatures from 100 degrees C to 300 degrees C are studied, in which the Cu2O tree-like sensor performed the best sensitivity comparing with the rest samples. A transformation from Cu2O to CuS is considered as the sensing mechanism of the sensors. Finally, influences of the morphologies onto the sensing properties are analyzed and compared. (C) 2014 Elsevier B.V. All rights reserved.
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