Journal
SENSORS AND ACTUATORS B-CHEMICAL
Volume 180, Issue -, Pages 71-76Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2012.03.025
Keywords
Light-addressable potentiometric sensor; Ammonium ion; Rapid thermal annealing; Carbon tetrafluoride plasma; Hafnium oxide
Funding
- National Science Council of the Republic of China [NSC99-2221-E-182-056-MY3, NSC98-2221-E-182-057-MY3]
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In this article, the detection of ammonium (NH4+) ion using nanoscaled 2-nm thick atomic layer deposition (ALD)-hafnium oxide (HfO2) films with post rapid thermal annealing (RTA) and carbon tetrafluoride (CF4) plasma treatments based on light-addressable potentiometric sensor (LAPS) was investigated. 2-nm thick ALD-HfO2 films with post RTA and CF4 plasma treatment were fabricated as sensitive membranes, respectively. Measured pNH(4) response from 2-nm thick ALD-HfO2 LAPS was decreased with increasing annealing temperature and was improved under CF4 plasma treatment. The optimum pNH(4)-sensitivity of 37 mV/pNH(4) was achieved with both 900 degrees C annealing and 5 min CF4 plasma on ALD-HfO2 LAPS. When compared to the same structure without plasma treatment, the sensitivity was improved by approximate fourfold. Based on X-ray photoelectron spectroscopy (XPS) analysis, increased pNH(4)-sensitivity was attributed to polar dipole (F-O) formation in ALD-HfO2 thin films due to the incorporation of fluorine by CF4 plasma treatment. To assess interferences from other ions (H+, Na+, K+, and Ca2+), selectivity coefficients obtained by fixed interference method (FIM) measurements were presented. (C) 2012 Elsevier B.V. All rights reserved.
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