Journal
SENSORS AND ACTUATORS B-CHEMICAL
Volume 185, Issue -, Pages 59-69Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2013.04.087
Keywords
Electronic nose; Thin film; Multisensor microarray; Coating; Silicon dioxide; Tin oxide
Funding
- Russ. Ministry for Education and Science [14.B37.21.1219]
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We consider application of SiO2 coating as a coverage membrane to differentiate local gas-sensing properties of tin dioxide thin film employed in gas-analytical single-crystal multisensor microarrays. The approach is tested utilizing homogeneous and non-homogeneous coatings. It is found out that the SiO2 coating of homogeneous thickness, of 7 nm, just reduces gas response and gas recognition ability of the microarrays which might be explained by appearance of additional defects in the SnO2 film under Ar+ bombardment assisting the SiO2 deposition. The deposition of SiO2 coating of non-homogeneous thickness, of 2-24 nm, results in substantial enhancing of gas selectivity of the developed microarrays (C) 2013 Elsevier B.V. All rights reserved.
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