Journal
SENSORS AND ACTUATORS B-CHEMICAL
Volume 183, Issue -, Pages 428-433Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2013.04.021
Keywords
Porous silicon; Pressure sensor; Rugate-structured free-standing porous silicon; Lateral pressure difference; Fiber optics sensors; Photonic bandgap materials; Pressure sensitive membrane
Funding
- National Research Foundation of Korea (NRF)
- Ministry of Education, Science and Technology [2011-0023953]
- National Research Foundation of Korea [2011-0023953] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
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Rugate-structured free-standing porous silicon was used as a membrane for a fiber-optic sensor. This material was suitable as a pressure sensitive membrane because it showed a strong peak in the reflectance spectrum which can be used for sensor signal processing and because its elasticity modulus could be easily controlled. The membranes showed an effective response in a low pressure range between 0.0 and -20.0 kPa. In addition, the membranes showed multiple responses to organic gases as well as different pressures due to their gas-sensing capability imparted by their highly porous structure. (C) 2013 Elsevier B.V. All rights reserved.
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