Journal
SENSORS AND ACTUATORS B-CHEMICAL
Volume 161, Issue 1, Pages 28-44Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2011.12.003
Keywords
Ozone sensors; SnO2; In2O3; Thin film; Characterization; Comparison
Funding
- Ministry of Education, Science and Technology of Korea [2011-0028736]
- Korea Science and Engineering Foundation [R15-2008-006-01002-0]
- National Research Foundation of Korea [R15-2008-006-01002-0, 2008-0062149] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
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Short description of methods of ozone detection and sensing materials acceptable for those applications is presented in this paper. Advantages and disadvantages of SnO2 application for design of conductometric ozone sensors are discussed as well. For those purposes detailed characterization of the SnO2-based ozone sensors and comparative analysis of ozone sensors designed on the base of undoped SnO2 and In2O3 films deposited by spray pyrolysis was conducted. It was concluded that long recovery process and high chemical stability could be referred to the main disadvantages of the SnO2-based ozone sensors in comparison with the In2O3-based devices. (C) 2011 Elsevier B.V. All rights reserved.
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