Journal
SENSORS AND ACTUATORS B-CHEMICAL
Volume 161, Issue 1, Pages 1135-1138Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2011.10.084
Keywords
Nanoelectromechanical systems; Nanocantilevers; Biofunctionalization; Biosensing; Microcontact printing
Funding
- French National Agency for Research [ANR-08-NANO-015]
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In this paper, we present a back-end method for biofunctionalizing a large-scale array of nanocantilevers. Our method relies on the use of a modified microcontact printing process where molecules are delivered onto the fragile structures from the grooves of the stamp while its base sits on the chip, thus providing mechanical stability. We have used this method to print antibodies onto fabricated chips containing up to 10(5) nanostructures/cm(2) and the presence of antibodies was validated by fluorescent microscopy. Furthermore, measurement of the nanocantilever resonant frequency shifts provoked by a mean added mass of similar to 140 fg/cantilever demonstrated that the cantilevers retained their mechanical integrity. Hence, the method presented here aims at providing an answer to the biofunctionalization of freestanding nanostructures for their use as biosensors. (c) 2011 Elsevier B.V. All rights reserved.
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