Journal
SENSORS AND ACTUATORS B-CHEMICAL
Volume 157, Issue 2, Pages 606-614Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2011.05.030
Keywords
Microcantilever sensors; In-plane resonance mode; Quality factor; Detection in liquids; E. coli; Hg(2+) ions in water
Funding
- NSFC [60725414, 91023046]
- Chinese 973 Program [2011CB309503]
- Korean WCU [R32-2009-000-20087-0]
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A high quality-factor (Q-factor) in-plane-mode resonant cantilever sensor is developed for real-time bio/chemical detection in liquids. With electrothermal excitation and piezoresistive frequency read-out integrated, the proposed sensor is realized by micromachining technology. The in-plane mode cantilever resonator can substantially decrease the liquid drag force, comparing to conventional out-of-plane resonance-mode cantilever, thereby, having achieved a much higher Q-factor of 249 when the cantilever is connected with a phase-lock-loop (PLL) interface circuit in water. After the mass sensitivity is calibrated by specifically binding streptavidin-labeled Dynabeads with the biotin-immobilized cantilever in phosphate buffered saline (PBS) solution, specific-antibody immobilized cantilevers have been used in real-time detection of Escherichia coli in PBS solution. Real-time detection of Hg(2+) ions in aqueous Hg(NO(3))(2) is also carried out by using sensing-group-modified cantilevers, resulting in a finer noise-limited resolution than 100 ppb. (C) 2011 Elsevier B.V. All rights reserved.
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