4.7 Article

Enhancement of CO gas sensing properties in ZnO thin films deposited on self-assembled Au nanodots

Journal

SENSORS AND ACTUATORS B-CHEMICAL
Volume 151, Issue 1, Pages 127-132

Publisher

ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2010.09.036

Keywords

Zinc oxide; Nanostructured metal oxide; CO gas sensor; Au nanodot; Sputtering

Funding

  1. National Research Laboratory Program
  2. BK21 program, Korea
  3. Ministry of Education, Science and Technology [R01-2008-000-20014-0, 2010-0004327]
  4. National Research Foundation of Korea [2008-0061070, 2010-G002, 2010-0004327] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)

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We present an excellent detection of carbon monoxide (CO) gas using Al-doped ZnO nanostructured thin films deposited on self-assembled Au nanodots (ZnO/Au thin films). We formed the self-assembled Au nanodots by annealing a thin Au layer with a thickness of 2 nm at a moderate temperature of 500 degrees C prior to the growth of the main ZnO layer via the sputtering method. We observed an enhancement of CO gas sensing response in the ZnO/Au gas sensors by the insertion of a thin Au nucleation layer, especially showing a high maximum sensitivity to CO at 250 degrees C and a low CO detection limit of 5 ppm in dry air. In addition, the ZnO/Au thin film CO gas sensors displayed fast response and recovery behaviors. The observed improvement in gas sensing properties is mainly attributed to the effective formation of ZnO nanostructured morphology having a high specific surface-reaction area via self-assembled Au nanodots. These results along with a simple fabrication process demonstrate that the ZnO thin films deposited on self-assembled Au nanodots are very promising for low-cost and high-performance CO gas sensors. (C) 2010 Elsevier B.V. All rights reserved.

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