Journal
SENSORS AND ACTUATORS B-CHEMICAL
Volume 146, Issue 1, Pages 165-170Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2010.01.073
Keywords
NO2 sensor; Mesoporous WO3; Low frequency electrophoretic deposition; Sensitivity
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Mesoporous tungsten oxide was synthesized based on hard template method using silica as template. The produced material was investigated structurally using X-ray diffraction and high resolution TEM. The material was deposited on patterned alumina substrates through low frequency AC electrophoresis of which, the deposition pattern was studied using optical microscopy and SEM. Exposure of the sensors to NO2 in the temperature range of 150-300 degrees C resulted in highest sensitivity at 200 degrees C. Increasing temperature was found to produce faster response and recovery processes while the sensitivity decreased. (C) 2010 Elsevier B.V. All rights reserved.
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