Journal
SENSORS AND ACTUATORS B-CHEMICAL
Volume 149, Issue 1, Pages 116-121Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2010.06.014
Keywords
CO sensors; TiO2; Hollow hemispheres; Nanostructured
Funding
- Korea Ministry of Intelligence and Economy [K0004114]
- Korea Evaluation Institute of Industrial Technology (KEIT) [K0004114] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
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We report the fabrication of a highly sensitive gas sensor based on a network of nanostructured TiO2 hollow hemispheres (NTHH). O-2 plasma etching induces cross-linking of hexagonal-close-packed polystyrene array, which is adopted as a template substrate for room-temperature deposition of TiO2 thin film. High-temperature calcination effectively removes polystyrene template beads and promotes crystallization of TiO2, finally producing cross-linked NTHH via nanobridges. The gas-sensing capability of a NTHH-based sensor is demonstrated using 1-500 ppm CO. Our sensor exhibits a very high response of 4220% change in resistance when exposed to 500 ppm CO at 250 degrees C, whereas a gas sensor based on a plain TiO2 film shows a 195% change. The high sensitivity of the NTHH-based sensor is attributed to the enhanced gas sensing performance of the narrow nanobridges between hollow hemispheres. (C) 2010 Elsevier B.V. All rights reserved.
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